Parts cleaning
Parts cleaning is, depending on the parts geometry and cleaning specification, done by using different wet processes like wet immersion, spin or spray clean process or a combination of these technologies. AP&S can offer wet cleaning tools for e.g. carrier and boxes, FOUPs, quartz tubes or frames that are field approved in semiconductor or related industries.
CleanStep Parts
The CleanStep Parts is designed for etching and cleaning of PECVD
and diffusion boats such as graphite boats, quartz part, and silicon
carbide boats etc. using spray cleaning technique.
CleanStep Carrier Box
Ideal cleaning and drying tool for carriers, transport boxes, open cassettes, pods or FOUPs using a combination of spray and spin process techniques.
CleanStep Tube
Semi automated tube cleaner for horizontal or vertical quartz tube cleaning.
CleanStep Frames
coming up next...