Lotus systems equipment

AP&S owns all exclusive rights and intellectual property rights of LOTUS Systems GmbH. We are now pleased to inform that we are able to provide a full range of service support for all LOTUS Systems equipment globally.

Mini-Gemenex

Semi-automated wet bench for various applications like wafer cleaning, etching, stripping or developing.

Gemenex

Fully automated wet bench for various applications like wafer cleaning, etching, stripping or developing.

Ilios

Carrier and box cleaner up to 300mm FOUPs.

VTC

Vertical tube cleaner