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Semi|Parts
The modular, versatile single wafer wet system SpinStep is designed for single wafer etching, cleaning, lift-off, coating and developing.
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SEMICON Russia 2013
Visit us at Semicon Russia, Moscow
booth no. 107
June 5th - 6th, 2013
Welcome to AP&S and Semi|Parts
AP&S and Semi|Parts design and produce batch- and single wafer wet process equipment for surface treatment of substrates under cleanroom conditions for customers worldwide.
Based on our long-term experiences in the field of manufacturing technological equipment associated with our know-how in the wet process technology, we are able to offer standard equipment as well as customized solutions and refurbishment for various wet process tools.
For laboratories up to high volume production, AP&S and Semi|Parts offer a wide product range of manual, semi automated and fully automated solutions fitting your needs in the semiconductor-, MEMS- and micro-structuring industry.
Additional to our cleaning, etching, stripping, plating and lift-off solutions for flat/wafer-based substrates (silicon, gallium arsenide, germanium, sapphire etc.) we offer peripheric equipment for parts cleaning and chemical media distribution and management.