2003

2003

• Founding of AP&S (Purchase of the assests from SEZ Germany / HMR)

• Launch of automatic wet bench 200mm, A2

• 1st tool installation in Europe

2003

2005

2005

• Launch of semi-automatic wet bench TwinStepTM and MultiStepTM

• 1st tool installations in China and USA

2005

2006

2006

• Founding of AP&S Asia Pte. Ltd. | Singapore

2006

2007

2007

• Founding of AP&S Shanghai Ltd. | China

• Expansion of office and manfucaturing space to 2000 m2 and 1500 m2

• Launch of automatic wet benches GigaStepTM and VulCanioTM

2007

2008

2008

• Founding of AP&S Service Centre | Malaysia

2008

2009

2009

• Founding of SEMI|PARTS for single wafer wet applications and parts cleaning systems

2009

2010

2010

• Expansion of manufacturing space to 3,000 m2

• Module standardisation of our wet bench systems

2010

2012

2012

• AP&S acquires exclusive rights and IP of Lotus Systems

• Founding of APS Service Centre in Dresden | Germany

• Patent application for Single Wafer Lift-off Process

2012

2013

2013

• Installation of our new Single Wafer Demo Centre

2013

2015

2015

• Standardisation of our Single Wafer product lines

• Introduction of our new Online Product Configurator

2015

2016

2016

• Acquisition of a majority holding in the software specialist company tepcon GmbH

• Expansion of our Demo Centre

• Creation of the two Business Units Batch Process and Single Wafer

2016

2017

2017

• Founding of the Business Unit After Sales

2017
inject product configurator
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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.