We make your FSI Mercury tool fit for the future

AP&S refurbishes all kinds of Mercury tools and adapt them to the steadily increasing technology requirements. Our FSI Mercury refurbishment program offers the following options: 

  • Replacement of critical parts like controls, pneumatic modules, displays, measuring devices and switching racks
  • Guaranteed availability of spare parts for 10 years, achieved by using state-of-the-art components
  • 18“ touch display for ergonomic operation
  • Latest software including SECS interface
  • Innovative software options like dashboards for service and maintenance, parameter monitoring etc.



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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.