Full range of wet process solutions

Whether a standard tool or a customer-specific solution is required: Our modular product spectrum is tailored to your needs!

The AP&S product range includes manual, semi-automated and fully automated wet process tools for the semiconductor-, MEMS- and micro-structuring industries as well as the R&D sector. Our wet process equipment is ready for cleaning, etching, metal etching, PR strip, electroless plating, lift-off, drying and developing processes.

Wet Bench Equipment

wet immerson process
  • Our batch process tools offer you reliability and high throughput according to customers’ demands for wafers up to 300 mm
  • Outstanding features e.g. the 100 wafer half-space function of the A-series and innovative processes like the one performed by our e-less plating tool Vulcanio ensure convincing performance

Production Supporting Tools

foup cleaner
  • Our wide range of production supporting tools includes parts cleaning equipment, laboratory equipment as well as chemical supply management systems
  • AP&S offers you comfortable access to everything you need to assure your wet processes in the semiconductor production line 

Single Wafer Equipment

single wafer process bowl
  • The AP&S single wafer tools are unique in reproducibility, stability and user-friendliness
  • Tool demonstrations in our Demo Center give you a great process experience and supports your decision making process
  • Further advantage is the high flexibility achieved by our modular batch design concept

Refurbishment and After Sales Services

wet process
  • AP&S offers you a wide range of after sales services as well as reliable and fast spare parts delivery
  • AP&S refurbishment programs are available for the following wet process tool types: AP&S, HMR, Steag (successor: Mattson / Akrion), Lotus Systems, FSI Mercury. 
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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.