Wet process systems of the highest standard

AP&S - partner for wet stations and single wafer spin processors

News

Come see us at Semicon Russia 2015

As every year, we will exhibit our latest batch and single wafer tool portfolio at the Semicon in Russia. In terms of fulfilling a wide range of application challenges for our clients we will also show you our solutions in research of innovative technologies, such as our new lift-off process.

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AP&S at Semicon China 2015

For the 11th time AP&S was a proud exhibitor at the Semicon China 2015 in Shanghai. A huge number of Chinese and international visitors showed their interest in our improved wet bench solutions and recently created single wafer systems and brought us their newest project challenges.

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Affiliations

semi.org Silicon Saxony Microtec Südwest

Welcome to AP&S and Semi|Parts


AP&S and Semi|Parts design and produce batch- and single wafer wet process equipment for surface treatment of substrates under cleanroom/sterile conditions for customers worldwide.
 
Based on our extensive experience in the field of manufacturing technological equipment associated with our expertise related to wet process technology, we are able to offer standard equipment as well as customized solutions and refurbishment for various wet process tools.

For laboratories up to high volume production, AP&S and Semi|Parts offer a wide range of products, for manual, semi-automated and fully automated solutions, meeting your needs in the semiconductor-, MEMS- and micro-structuring industry.

In addition to our cleaning, etching, stripping, plating and lift-off solutions for flat/wafer-based substrates (silicon, gallium arsenide, germanium, sapphire etc.) we offer equipment to clean peripheral components as well as chemical media distribution and management devices.

ISO 9001 certificate
inject product configurator

CleanStep Carrier Box

The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.