Highest productivity and reliability, maximum flexibility and perfect product quality - that is what our customers expect from the production equipment in their semiconductor fabs. Correspondingly high are our expectations on the quality and sustainability of our wet process tools and our services. The AP&S After Sales Unit provides fast and competent support for customers worldwide, ensuring process reliability and high uptime. This is achieved by our long-standing market experience, smart service network, extensive technical know-how and best knowledge of chemical wet processing.
Before, during and after the commissioning of the AP&S wet process tool in your semiconductor production plant, our team of highly trained field service engineers provides you fast and competent support to ensure process reliability, high uptime and best throughput. This includes: Fast and qualified maintenance and technical service support worldwide, tool installations, relocations and on-site upgrades.
The AP&S refurbishment programs adapt used wet process tools to current and upcoming technology requirements. The corner stones in this process are customers’ specific needs and our long-lasting experience in the field of automation and process control.
AP&S refurbishment is available for the following wet process tool types:
✓ Steag (successor: Mattson / Akrion)
✓ Lotus Systems
✓ FSI Mercury
AP&S refurbishes all kinds of Mercury tools and adapt them to the steadily increasing technology requirements. Our FSI Mercury refurbishment program offers the following options:
Guaranteed availability of spare parts ensures maximum uptime and therefore the efficiency of your wet process tools. Therefore AP&S offers you a wide range of spare parts and fast delivery to customers worldwide. Supply from our warehouse or from consignment stock on-site are both possible.
Please fill-in this contact form and enter your wet process tool type as well as the WB number in the field "Your message".
Our After Sales team will answer you within 24 hours.