AP&S Demo Center -
A key component of the company’s
customer-oriented wet process development

Demo Center

R&D

Demo Center

Are you looking for a perfect wet process solution meeting your specific requirements? Come to our in-house application laboratory at the AP&S headquarters in Donaueschingen, Germany and you will find it.

An investment in a wet process application is a significant decision, at which many important aspects and complex contexts have to be taken into account. AP&S supports efficiently your decision making process by providing a variety of tool demonstrations. By visiting our demo center you will receive all required information for a well-founded buying decision:

Demo Center

Process experience

In the AP&S demo center you can test the wet process application, which you are interested in. Our high-qualified process engineering team will explain you all details of the process tool and will answer all your questions. You will receive a comprehensive test report containing complete parameters of the process set-up, a recommendation for process recipe due to test results and further important system configuration details.

Demo Center

Quality Check

After the demonstration the quality of the wet process results can be inspected with a microscope and a CCD-Camera.

Demo Center

Time and cost savings

Until the start of the production we offer you an in-house process evaluation including a definition of process parameters, a calculation of the throughput as well as the chemical consumption.

Demo Center

High process efficiency and optimal outcome

Prior to the tool delivery we invite your staff to our demo center for in-house trainings. Thus, directly after the tool installation they will be able to start their work and achieve optimal results with the new tool.  

Demo Center

Confidence

By visiting the AP&S demo center you will get to know our wet process tools and their performance. Furthermore you will see the company headquarters including the production hall; find out how we use to work and last but not least you will get to know the people behind AP&S.

TECHNICAL SPECIFICATIONS

RECENT DEVELOPMENTS AND INVESTMENTS

Which wet process demonstrations are available?

Singles Wafer

  • metal lift-off
  • metal etching
  • various cleaning processes
  • mask cleaning
  • photoresist strip

Which wafer sizes and chuck variations can be handled?

Wafer Sizes

  • Diameter (round substrates): up to 300 mm
  • Side length (square substrates): up to 9“
  • Thickness: up to 10 mm

Chuck variations

  • Low contact chucks
  • Vacuum chucks

Main features of the wet process demonstration tool:

  • MegPie megasonic system
  • Megasonic nozzle
  • High pressure (DI-water/solvent)
  • Puddle nozzle / spray mixing nozzle
  • Backside protection with DI-H2O or N2
  • 4 chemicals distribution systems
  • 2 tempering units for solvent / acid / base application
  • Drain separation
  • Programmable chuck height
  • Automatic handling incl. wafer mapping up to 200 mm

Additional features:

  • Presoak station
  • Ultrasonic cleaning module

„We at AP&S see it as our mission, to support customers efficiently during their decision making and buying process, to ensure they receive the perfect wet process solution, that meets their specific requirements. Therefore, we offer them a variety of tool demonstrations in our Demo Center.“

Stefan Zürcher, Process Engineer

Contact

Your inquiry

We look forward to your visit. Please fill-in the contact form and our process engineering team will get in touch with you for an appointment.