Supporting equipment

Chemical wet process auxiliary tools

Supporting equipment

To ensure efficient wet processes in our customers’ semiconductor fabs is our primary goal. Therefore, supporting equipment like foup and box cleaner, drying tools for wafers, laboratory equipment and chemical management solutions belong to our product range too.  In this way, our customers receive everything they need from one single source and have a competent partner for all relevant concerns about wet chemical processes by their side.

Products

Supporting equipment

CleanStep
Carrier Box

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CleanStep
Parts

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CleanStep

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Chemical
Management

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Supporting equipment

CleanStep CBII, CBIII

Efficient cleaning tool for all common types of carrier, boxes, SMIF-Pod’s and FOUP’s.
Main Benefits
  • The CleanStep Carrier Box combines multiple work steps in one tool
  • Up to 3 runs per hour*
  • Setting up between cleanroom and greyroom is possible, as the tool is accessible from two sides (back and front)
Processes

Cleaning and Drying

Important technical features
  • Smart fixture system for easy and fast exchange of different box and carrier types
  • Easy handling incl. load and unload
  • Process control via latest software technology, SECS/GEM
  • Suitable to in-house tracking system
  • Optimized footprint: CB II 1560 x 1900 x 2510mm; CB III 1865 x 1685 x 2610mm
  • Cleanstep II loading capacity: 8 carriers, 8 boxes or 24 carriers without boxes
  • Cleanstep III loading capacity: FOUP’s up to 8 complete sets, for SMIF-Pod’s up to 8 complete sets with carrier

*depends on cassette/ carrier/ SMIF/ FOUP type

Supporting equipment

SprayCleaner

The SprayCleaner is designed for etching and cleaning of PECVD and diffusion boats such as graphite boats, quartz parts, silicon carbide boats.
Main Benefits
  • This tool processes with an innovative spray cleaning technique, that achieves optimized process time, while requiring less chemical consumption compared to an immersion process
Processes

Etching and Cleaning

Important technical features
  • Optimization of CoO due to very small footprint and reduced DI water consumption, that is 2 times lower compared to an immersion process
  • Minimized cleaning costs per boat by low chemical consumption, which is in fact 10 times lower compared to an immersion process
  • Highest safety for the operator as the tool processes by closed chamber only, loading and unloading happens solely after complete rinse of process chamber. Furthermore, a fail-safe door locking system is installed
  • Highest process safety due to overfilling protection function and exhaust monitoring
  • High and fast availability and low maintenance requirements achieved by the modular design and long life components

Supporting equipment

CleanStep Tube

The Vertical and Horizontal Tube Cleaner are specially designed for the cleaning of quartz tubes, liners and boats of different sizes.
Main Benefits
  • Optimized footprint
  • Fully automated cleaning process
  • Flexible modular construction
  • Advanced graphical user interface
  • Extremely maintenance friendly
Substrates

Quartz tubes of different sizes

Processes
  • HF/HNO3 cleaning
  • dHF for final cleaning (optional)
  • DIW for rinsing
  • Hot-DIW for final rinsing and better drying performance (optional)
mportant technical features
  • Programmable tube and liner rotation for efficient cleaning
  • Special inserts for quartz boats
  • Tanks for cleaning media placed beneath the cleaning basin – bulk fill and recirculation
  • Drain separation system
  • Acid saving spray process compared with immersion spray
  • Reliable and comfortable process control including a recipe editor
  • Up to 40 recipes with up to 50 steps each
  • Integrated DI and N2 guns

Supporting equipment

Chemical Management System

The Chemical Management System handles acids, solvents and caustics used in the semiconductor-, MEMS- and micro-structuring industries as well as the R&D sector.
Main benefits

The AP&S chemical management system is available for the following applications:

  • Chemical Distribution System (CDS)
  • Chemical Mixing System (CMS)
  • Chemical Waste System

Tool demonstration in the AP&S Demo Center is available

Important technical features 
  • Highest safety standard
  • Upgradeable system
  • Small footprint
  • Cross-linking with common commercial systems

Contact

Sales Team

+49 771 8983-0