To ensure efficient wet processes in our customers’ semiconductor fabs is our primary goal. Therefore, supporting equipment like foup and box cleaner, drying tools for wafers, laboratory equipment and chemical management solutions belong to our product range too. In this way, our customers receive everything they need from one single source and have a competent partner for all relevant concerns about wet chemical processes by their side.
Cleaning and Drying
*depends on cassette/ carrier/ SMIF/ FOUP type
Etching and Cleaning
Quartz tubes of different sizes
The AP&S chemical management system is available for the following applications:
Tool demonstration in the AP&S Demo Center is available