Wet Process Equipment

Specialized in design and production AP&S is able to offer standard wet process equipment as well as customized solutions. Being experienced in refurbishment of various wet tool types we can offer the most efficient solution for our customers.
Whether batch immersion in wet bench, spin process in single wafer wet equipment or spray process for parts cleaning, please ask for our expertise or demonstration.


Wet Bench Equipment

wet immerson process

Parts Cleaning Equipment

foup cleaner

Laboratory Equipment


Lotus Systems Equipment

Lotus Systems equipment

Single Wafer Equipment

single wafer process bowl

Chemical Management Equipment


Refurbishment

refurbishment of wet equipment
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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.