Wet process equipment

Specialized in design and production AP&S is able to offer standard wet process equipment as well as customized solutions. Being experienced in refurbishment of various wet tool types we can offer the most efficient solution for our customers.
Whether batch immersion in wet bench, spin process in single wafer wet equipment or spray process for parts cleaning, please ask for our expertise or demonstration.

Wet bench equipment

wet immerson process

Parts cleaning equipment

foup cleaner

Laboratory equipment

Lotus systems equipment

Lotus Systems equipment

Single wafer equipment

single wafer process bowl

Chemical management equipment


refurbishment of wet equipment
inject product configurator

CleanStep Carrier Box

The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

CMS System

The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.