Supporting equipment

Chemical wet process auxiliary tools

Supporting equipment

To ensure efficient wet processes in our customers’ semiconductor fabs is our primary goal. Therefore, supporting equipment like foup and box cleaner, drying tools for wafers, laboratory equipment and chemical management solutions belong to our product range too.  In this way, our customers receive everything they need from one single source and have a competent partner for all relevant concerns about wet chemical processes by their side.

Products

Supporting equipment

CleanStep
Carrier Box

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CleanStep
Parts

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CleanStep

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Chemical
Management

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Supporting equipment

CleanStep Carrier Box

Main Benefits
  • The CleanStep Carrier Box combines multiple work steps in one tool
  • Up to 3 runs per hour
  • Setting up between cleanroom and greyroom is possible, as the tool is accessible from two sides (back and front)
Processes

Cleaning and drying

Important technical features
  • Smart box holder system for easy and fast exchange of different box and carrier types
  • Easy handling incl. load and unload
  • Process control via latest software technology
  • Suitable to in-house tracking system
  • Optimized footprint: CB II 1560 x 1900 x 2510 mm; CB III 1865 x 1685 x 2860 mm
  • Cleanstep II Loading capacity: 8 carriers and 8 boxes
  • Cleanstep III Loading capacity: 8 SMIF´s and 8 doors + 8 Carriers; 8 FOUP´s and 8 doors

Supporting equipment

CleanStep Parts

Main Benefits
  • This tool processes with an innovative spray cleaning technique, that achieves optimized process time, while requiring less chemical consumption compared to an immersion process.
Processes

Etching and cleaning

Important technical features
  • Optimization of CoO due to very small footprint and reduced DI water consumption, that is 2 times lower compared to an immersion process
  • Minimized cleaning costs per boat by low chemical consumption, which is in fact 10 times lower compared to an immersion process
  • Highest safety for the operator as the tool processes by closed chamber only, loading and unloading happens solely after complete rinse of process chamber. Furthermore, a fail-safe door locking system is installed
  • Highest process safety due to overfilling protection function and exhaust monitoring
  • High and fast availability and low maintenance requirements achieved by the modular design and long life components

Supporting equipment

CleanStep

Main Benefits
  • Optimized footprint
  • Unique modular construction
  • Advanced graphical user interface
  • Extremely maintenance friendly
Substrates

Quartz tubes of different sizes

Processes

Cleaning steps with chemistry and rinsing with DIW

Important technical features
  • Fully automated cleaning process
  • High or low profile cassettes
  • Tanks for cleaning media placed beneath the cleaning basin – bulk fill and recirculation
  • Reliable and comfortable process control including a recipe editor

Supporting equipment

Chemical Management

Applications

The AP&S chemical management system is available for the following applications:

  • Chemical Distribution System (CDS)
  • Chemical Mixing System (CMS)
  • Chemical Waste System
Important technical features 
  • Highest safety standard
  • Upgradeable system
  • Small footprint
  • Cross-linking with common commercial systems

Contact

Sales Team

+49 771 8983-0