WET BENCH solutions

Outstanding throughput, unbeatable cost of ownership ratio, comprehensive process control. 

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Wet bench tools

SINGLE WAFER solutions

Excellent result quality, highest reproducibility and process stability, convenient and precise process control.  

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Single wafer wet process tool


At AP&S you receive reliable all-round support for your wet processes worldwide! 

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Field service, spare parts for wet process tools

33 reasons to be a customer of AP&S

With AP&S you have a strong and reliable partner by your side, offering you not only the required wet process solutions but so much more.

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Fully automated wet stations and manual wet processors
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wet process tools

Cover Story about AP&S in the Silicon Semiconductor magazine

The Silicon Semiconductor magazine, one of the leading publications for the silicon semiconductor cummunity worldwide, has published the cover story “Customer focus drives AP&S growth” in it's 4th Issue 2017.

“Getting to know AP&S International (Donaueschingen, Germany) is somewhat like receiving a nesting or Matryoshka doll: there is a new layer to be discovered at every turn”, writes Silicon Semiconductor editor Mark Andrews, who spoke with AP&S CEO, Alexandra Laufer-Müller.

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Wet process solution provider

Social entrepreneurial commitment of AP&S International GmbH

At the general meeting of WVIB (The Trade Association of Industrial Enterprises in the Baden Region, Germany) in Freiburg, which was held on November 10th 2017, Alexandra Laufer-Müller, CEO of AP&S International GmbH, was elected to the WVIB advisory board.

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Wet process solution provider

Overcrowded AP&S booth at Semicon Europa 2017 – Impressions video

The participation at the Semicon Europa exhibition, which took place from 14. to 17. November 2017 in Munich, was a great success for AP&S. Watch our review video here.


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wet process solutions

AP&S - We are your partner for wet process equipment

Semiconductor equipment for wet processing, effective wet process equipment for MEMS- and micro-structuring markets, foup and box cleaner, drying tools for wafer process, laboratory equipment and chemical management solutions - we offer all these products and much more.

AP&S designs and produces batch- and single wafer wet process solutions for surface treatment of substrates under cleanroom conditions for customers worldwide.

Our product portfolio includes manual, semi-automated and fully automated wet process tools perfectly fitting to the requirements of the semiconductor-, MEMS- and micro-structuring industries as well as the R&D sector. Standard as well as customized wet process applications are both available. Additional to our cleaning, etching, stripping, plating and lift-off solutions for flat/wafer-based substrates (silicon, gallium arsenide, germanium, sapphire etc.) we deliver peripheral equipment for parts cleaning, chemical media distribution and management. Furthermore we offer refurbishment programs for used wet process tools like FSI Mercury, Steag and others.

The AP&S headquarters is located in Donaueschingen, Germany. The company's subsidiaries are in China, Singapore and Malaysia.

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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.