WET BENCH solutions

Outstanding throughput, unbeatable cost of ownership ratio, comprehensive process control. 

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Wet bench tools

SINGLE WAFER solutions

Excellent result quality, highest reproducibility and process stability, convenient and precise process control.  

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Single wafer wet process tool


At AP&S you receive reliable all-round support for your wet processes worldwide! 

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Field service, spare parts for wet process tools


We have a solution that fits. Whichever direction you choose to take, we're going there with you. We can read your road map an help you reach your desired destinitation efficiently and in great shape.

Fully automated wet stations and manual wet processors


IoT tool for wet process applications

300 mm wet process technology, futuristic HoloLens demonstrations and much more await visitors at the AP&S booth at SEMICON Europa 2017

From 14. to 17. November the semiconductor industry will gather at the SEMICON Europa trade fair, for the first time co-located with productronica in Munich, Germany. AP&S as one of the exhibitors is ready to welcome visitors at the booth 1739 in hall B1.

“The AP&S IoT solutions will be one of this year’s highlights”, says Christoph Kluge, Director Software Development, and adds, “We will present our latest Microsoft HoloLens project, so that our visitors will be able to step into the virtual world and interact with our wet process tools directly at the booth. Furthermore, interested parties can try the AP&S Web Worker App, a tool enabling a comfort and time-saving access to the full data archive of wet process applications, with any device and from all over the world.”

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Watch our new movie about the AP&S Web Worker App

An innovative IoT service tool offering outstanding advantages like convenient control and fast data access from all over the world with any device. 

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IoT solution for wet processes in the semiconductor industry

STC Standard Technology Corp. Taiwan becomes new distribution partner of AP&S. The partners celebrate the cooperation at a joint booth at SEMICON Taiwan 2017.

AP&S International GmbH and the new partner STC Standard Technology Corp. Taiwan start into the cooperation with a common booth at the upcoming SEMICON Taiwan event, which will take place from 13th to 15th September 2017 in Taipei, Taiwan. 

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Welcome to AP&S International


AP&S designs and produces batch- and single wafer wet process solutions for surface treatment of substrates under cleanroom conditions for customers worldwide.

Our product portfolio includes manual, semi-automated and fully automated wet process tools perfectly fitting to the requirements of the semiconductor-, MEMS- and micro-structuring industries as well as the R&D sector. Standard as well as customized wet process applications are both available. Additional to our cleaning, etching, stripping, plating and lift-off solutions for flat/wafer-based substrates (silicon, gallium arsenide, germanium, sapphire etc.) we deliver peripheral equipment for parts cleaning, chemical media distribution and management. Furthermore we offer refurbishment programs for used wet process tools like FSI Mercury, Steag and others.

AP&S provides you convincing innovations, high qualified services and expert support. We achieve this with our long-standing industry experience, in-depth technical expertise, best knowledge of chemical wet processing and a smart service network.

The AP&S headquarters is located in Donaueschingen, Germany. The company's subsidiaries are in China, Singapore and Malaysia.

Wet process tools, wet prosess solution, tool for semiconductor industry
ISO 9001 certificate
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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.