Success in the TOP 100 competition!

AP&S is one of the innovation leaders 2018.

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15th anniversary of AP&S

WET BENCH solutions

Outstanding throughput, unbeatable cost of ownership ratio, comprehensive process control. 

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Wet bench tools

SINGLE WAFER solutions

Excellent result quality, highest reproducibility and process stability, convenient and precise process control.  

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Single wafer wet process tool


At AP&S you receive reliable all-round support for your wet processes worldwide! 

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Field service, spare parts for wet process tools

33 reasons to be a customer of AP&S

With AP&S you have a strong and reliable partner by your side, offering you not only the required wet process solutions but so much more.

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Impressions from the AP&S 15th company anniversary celebration

On Monday, 2nd July the 15th company anniversary celebration took place at the AP&S headquarters in Donaueschingen-Aasen. With 100 invited guests from politics, business and local organizations AP&S took a look back to its history and important milestones, which led to the company’s success in the international semiconductor market, but gave also an insight into the ongoing projects and an outlook on the future. Watch the impressions compilation

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AP&S receives the award as TOP 100 innovator 2018

This year AP&S International GmbH belongs to the TOP 100 innovation leaders of German SMEs. This is the result of the analysis, carried out by the scientific director of the TOP 100 competition, Prof. Dr. Nikolaus Franke and his top-class jury. In the independent selection process, AP&S was particularly successful in the categories "Innovation Success" and "Innovative Processes and Organization“, and thus positions itself as one of the most innovative companies in the market.

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AP&S commitment to ice hockey

Since the ice hockey season 2017/2018 AP&S International GmbH has been a sponsor of the famous hockey team Wild Wings and Wild Wings Future, the promoting young talent department, both from Schwenningen, a German town close to the AP&S headquarters. Furthermore, the company supports the ice skating school of the Ice Sport Club Dresden Association in the city Dresden, where an AP&S subsidiary is located offering on-site support for many key customers, based in this region.

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Affiliations Silicon Saxony Microtec Südwest

AP&S - We are your partner for wet process equipment

Semiconductor equipment for wet processing, effective wet process equipment for MEMS- and micro-structuring markets, foup and box cleaner, drying tools for wafer process, laboratory equipment and chemical management solutions - we offer all these products and much more.

AP&S is one of the leading providers of batch- and single wafer wet process solutions for surface treatment of substrates under cleanroom conditions for customers worldwide.

Our product portfolio includes manual, semi-automated and fully automated wet process tools perfectly fitting to the requirements of the semiconductor-, MEMS- and micro-structuring industries as well as the R&D sector. Additional to our cleaning, etching, stripping, plating and lift-off solutions for flat/wafer-based substrates (silicon, gallium arsenide, germanium, sapphire etc.) we deliver peripheral equipment for parts cleaning, chemical media distribution and management. Furthermore we offer refurbishment programs for used wet process tools like FSI Mercury, Steag and other.

The AP&S headquarters is located in Donaueschingen, Germany. The company's subsidiaries are in China, Singapore and Malaysia.

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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.