At AP&S you receive reliable all-round support for your wet processes worldwide!

Find out more about services offered by our new After Sales Unit here

Field service, spare parts for wet process tools


We have a solution that fits. Whether you want to grow and explore new paths, or stay on familiar ground, our modular product spectrum is in step with your needs. Even when they change.

Fully automated wet stations and manual wet processors


We have a solution that fits. Success isn't about being like the rest. So a one-size-fits-all approach is a definite misfit. We tailor our products to your individual needs - and even iron out any problem zones.

Fully automated wet stations and manual wet processors


We have a solution that fits. Whichever direction you choose to take, we're going there with you. We can read your road map an help you reach your desired destinitation efficiently and in great shape.

Fully automated wet stations and manual wet processors


New in-house application laboratory at the AP&S headquarters – A key component of the company’s customer-oriented wet process development

In 2016 AP&S International GmbH made significant investments in the expansion and modernization of its in-house laboratory. The size of the laboratory has almost tripled - originally 23 m³, now after the renovation it occupies an area of 66 m³. Since reopening in 2017 the new, modified laboratory, called Demo Center, welcomes customers from all over the world and offers them a variety of single wafer process demonstrations

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Commitment to the campaign "Unity. Justice. Freedom."

AP&S International GmbH shows commitment to the current campaign "Unity. Justice. Freedom.“ of WVIB (The Trade Association of Industrial Enterprises in the Baden Region, Germany). The campaign highlights the basic values of German democracy, shows which significant role these play for a modern, strong Germany and a united, stable Europe and points out the importance of each individual’s commitment to preserve these values.

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AP&S offers a unique metal lift-off process for the LED manufacturing industry

At the beginning of 2017 the AP&S metal lift-off process, which was launched in 2012 and runs successfully at several AP&S key customers sites within Europe today, was further developed and adjusted for the use in LED production.

The AP&S metal lift-off process is a single wafer spin process, offering three outstanding USP’s: 

  1. Superb solvent performance, without impact on substrate and structures
  2. Use of DMSO (dimethyl sulfoxide), an EH&S uncritical substance (EU & US)
  3. Optimized process time with an positive impact to the overall throughput 

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AP&S International GmbH achieves competitive advantage by investing in a new ultra-high purity water system

The investment of AP&S International GmbH (AP&S) in a ultra-high purity water system (UHPW) pays off. The system, with a state-of-the art concept brings not only pure water and cost savings, but primarily technological progress, considerable benefits for the customers and consequently competitive advantage for AP&S in the international equipment market.

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Affiliations Silicon Saxony Microtec Südwest

Welcome to AP&S International

AP&S International designs and produces batch- and single wafer wet process equipment for surface treatment of substrates under cleanroom/sterile conditions for customers worldwide.
Based on our extensive experience in the field of manufacturing technological equipment associated with our expertise related to wet process technology, we are able to offer standard equipment as well as customized solutions and refurbishment for various wet process tools.

For laboratories up to high volume production, we offer a wide range of products, for manual, semi-automated and fully automated solutions, meeting your needs in the semiconductor-, MEMS- and micro-structuring industry.

In addition to our cleaning, etching, stripping, plating and lift-off solutions for flat/wafer-based substrates (silicon, gallium arsenide, germanium, sapphire etc.) we offer equipment to clean peripheral components as well as chemical media distribution and management devices.

Wet process tools, wet prosess solution, tool for semiconductor industry
ISO 9001 certificate
inject product configurator
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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.