WET BENCH solutions

Outstanding throughput, unbeatable cost of ownership ratio, comprehensive process control. 

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Wet bench tools

SINGLE WAFER solutions

Excellent result quality, highest reproducibility and process stability, convenient and precise process control.  

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Single wafer wet process tool


At AP&S you receive reliable all-round support for your wet processes worldwide! 

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Field service, spare parts for wet process tools

33 reasons to be a customer of AP&S

With AP&S you have a strong and reliable partner by your side, offering you not only the required wet process solutions but so much more.

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Fully automated wet stations and manual wet processors


Overcrowded AP&S booth at Semicon 2017 – Impressions video

The participation at this year’s Semicon Europa exhibition, which took place from 14. to 17. November, for the first time in Munich, co-located with productronica, was a great success for AP&S.

“The feedback from our business partners regarding our booth, wet process solutions and our ongoing developments and projects was very, very positive.”, says Tobias Bausch, Director Sales and Marketing at AP&S.

With the attached review video, we would like to share our impressions and thank once again all visitors, who passed by our booth.

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Wet process solution provider

300 mm wet process technology, futuristic HoloLens demonstrations and much more await visitors at the AP&S booth at SEMICON Europa 2017

From 14. to 17. November the semiconductor industry will gather at the SEMICON Europa trade fair, for the first time co-located with productronica in Munich, Germany. AP&S as one of the exhibitors is ready to welcome visitors at the booth 1739 in hall B1.

“The AP&S IoT solutions will be one of this year’s highlights”, says Christoph Kluge, Director Software Development, and adds, “We will present our latest Microsoft HoloLens project, so that our visitors will be able to step into the virtual world and interact with our wet process tools directly at the booth. Furthermore, interested parties can try the AP&S Web Worker App, a tool enabling a comfort and time-saving access to the full data archive of wet process applications, with any device and from all over the world.”

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semi.org Silicon Saxony Microtec Südwest

Welcome to AP&S - Your wet process equipment provider

Semiconductor equipment for wet processing, effective wet process equipment for MEMS- and micro-structuring markets, foup and box cleaner, drying tools for wafer process, laboratory equipment and chemical management solutions - we offer all these products and much more.

AP&S designs and produces batch- and single wafer wet process solutions for surface treatment of substrates under cleanroom conditions for customers worldwide.

Our product portfolio includes manual, semi-automated and fully automated wet process tools perfectly fitting to the requirements of the semiconductor-, MEMS- and micro-structuring industries as well as the R&D sector. Standard as well as customized wet process applications are both available. Additional to our cleaning, etching, stripping, plating and lift-off solutions for flat/wafer-based substrates (silicon, gallium arsenide, germanium, sapphire etc.) we deliver peripheral equipment for parts cleaning, chemical media distribution and management. Furthermore we offer refurbishment programs for used wet process tools like FSI Mercury, Steag and others.

AP&S provides you convincing innovations, high qualified services and expert support. We achieve this with our long-standing industry experience, in-depth technical expertise, best knowledge of chemical wet processing and a smart service network.

The AP&S headquarters is located in Donaueschingen, Germany. The company's subsidiaries are in China, Singapore and Malaysia.

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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.