Fast and sustainable support for your wet processes on a global base

Our customers are faced daily with significant challenges in their production plants. Correspondingly high are our expectations on the quality and sustainability of our wet process tools and our services.

The AP&S After Sales Unit provides fast and competent support for customers worldwide, ensuring process reliability and high uptime. This is achieved by our long-standing market experience, smart service network, extensive technical know-how and best knowledge of chemical wet processing.


The AP&S After Sales Unit is looking forward to your inquiry! 

Please contact Tobias Drixler, Director Business Unit After Sales: 

Phone +49 771-8983-148

Fax +49 771-8983-18148


Alternatively, fill in the contact form.


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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.