Reliability through quick response and qualified support

Before, during and after the commissioning of the AP&S wet process tool in your semiconductor production plant, our team of highly trained field service engineers provides you fast and competent support to ensure process reliability, high uptime and best throughput.

This includes: 

  • Fast and qualified maintenance and technical service support worldwide
  • Tool installations, relocations and on-site upgrades

AP&S Offices worldwide

Your contact persons for field service are:

Markus Schwenk

Senior Manager After Sales

Phone +49 771 8983 - 211

E-mail 

Michael Schlegel

Senior Manager After Sales

Phone +49 771 8983 - 228

E-mail

Ronny Schmidt

Senior Manager After Sales

Phone +49 771 8983 - 246

E-mail

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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.