Higher production efficiency through AP&S refurbishment

The AP&S refurbishment programs adapt used wet process tools to current and upcoming technology requirements. The corner stones in this process are customers’ specific needs and our long-lasting experience in the field of automation and process control.

The AP&S refurbishment programs contain: 

  • Reconditioning of machines
  • Replacement of outdated components
  • Modifications of process modules
  • New tool software
  • SECS/GEM communication interface
  • Adjustment to new standards
  • New PLC and IPC control systems
  • Safety upgrades
  • Dryer upgrades
  • Upgrade degree of tool automation

AP&S refurbishment is available for the following tool types: AP&S, HMR, Steag (successor: Mattson / Akrion), Lotus Systems, FSI Mercury. 

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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.