Chemical Supply Systems / Chemical Management Systems

Our fully automated chemical management systems are designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries. 

Chemical supply systems and chemical management systems from AP&S are available for the following applications:

  • Chemical Distribution System (CDS)
  • Chemical Mixing System (CMS)
  • Chemical Waste System (CWS)
  • Slurry System (Mixing or Distribution System)

Point-of-use boxes and pipe work can also be offered.
Data Sheet Chemical Management System

>> configure your CMS System

chemical management system

Contact

Tobias Drixler
Phone: +49 771 8983-148
E-mail

inject product configurator
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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.