Parts Cleaning Solutions for FOUPs, Boxes and Tubes

AP&S offers wet equipment platforms starting from basic manual wet benches on laboratory or R&D level up to fully-automatic high volume production and high-end technology tools. Depending on the wet cleaning or wet etching application, different standard features are required, all of these can be covered with our modular wet bench solutions. Customization due to special application, wafer material or product design is our daily business. 



Tobias Drixler
Phone: +49 771 8983-148

Quartz parts cleaner

CleanStep Parts

The CleanStep Parts is designed for etching and cleaning of PECVD and diffusion boats such as graphite boats, quartz parts, and silicon carbide boats etc. using spray cleaning technique.

Data Sheet CleanStep Parts

Cleaning tool for carriers and boxes

CleanStep Carrier Box

Ideal cleaning and drying tool for carrier cleaning, box cleaning, open cassette cleaning, pods or FOUP cleaning using a combination of spray and spin process techniques.

Data Sheet CleanStep Carrier Box

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Quartz Tube Cleaner - Cleanstep Tube

CleanStep Tube

Semi automated tube cleaner for horizontal or vertical quartz tube cleaning.

Data Sheet CleanStep Tube

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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.