AP&S offers wet equipment platforms starting from basic manual wet benches on laboratory or R&D level up to fully-automatic high volume production and high-end technology tools. Depending on the wet cleaning or wet etching application there are different standard features availble that can be covered in our modular wet bench solutions. Customization due to special application, wafer material or product design is our daily business.
The CleanStep Parts is designed for etching and cleaning of PECVD and diffusion boats such as graphite boats, quartz parts, and silicon carbide boats etc. using spray cleaning technique.
Ideal cleaning and drying tool for carrier cleaning, box cleaning, open cassette cleaning, pods or FOUP cleaning using a combination of spray and spin process techniques.