Lotus Systems Equipment

AP&S owns all exclusive rights and intellectual property rights of LOTUS Systems GmbH. We are now pleased to announce that we are able to provide a full range of service support for all LOTUS Systems equipment globally.

Mini-Gemenex

Semi-automated wet bench for various applications like wafer cleaning, etching, stripping or developing.

Gemenex

Fully automated wet bench for various applications like wafer cleaning, etching, stripping or developing.

foup cleaner ap-s lotus systems ilios cb iii

Ilios

Carrier and box cleaner up to 300mm FOUPs.

VTC

Vertical tube cleaner

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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.