Extensive After Sales concept
for best customer support

AFTER SALES

Fast and sustainable support for your wet processes on a global base

Highest productivity and reliability, maximum flexibility and perfect product quality - that is what our customers expect from the production equipment in their semiconductor fabs. Correspondingly high are our expectations on the quality and sustainability of our wet process tools and our services. The AP&S After Sales Unit provides fast and competent support for customers worldwide, ensuring process reliability and high uptime. This is achieved by our long-standing market experience, smart service network, extensive technical know-how and best knowledge of chemical wet processing.

THE AP&S AFTER SALES CONCEPT INCLUDES

FIELD SERVICE

RELIABILITY TROUGH QUICK RESPONSE AND QUALIFIED SUPPORT

Before, during and after the commissioning of the AP&S wet process tool in your semiconductor production plant, our team of highly trained field service engineers provides you fast and competent support to ensure process reliability, high uptime and best throughput. This includes: Fast and qualified maintenance and technical service support worldwide, tool installations, relocations and on-site upgrades.

Field Service

Contact

Michael Schlegel

Senior Manager After Sales

+49 771 8983-228

René Wirthgen

Senior Field Service Engineer

+49 351 8925-971

Rosario Carluccio

Manager AP&S Service Office Catania, Italy

+39 1515 8419-723

Katja Kleinhans

Service Orders

+49 771 8983-178

Wenjian Gu

Manager AP&S Semiconductor Equipment Co., Ltd., China

+86 138 1604 6478

Refurbishment

Higher production efficiency
through AP&S refurbishment

The AP&S refurbishment programs adapt used wet process tools to current and upcoming technology requirements. The corner stones in this process are customers’ specific needs and our long-lasting experience in the field of automation and process control.

OVERHAUL OF MACHINES

Replacement of outdated components

Modifications
of process
modules

New tool
software

SECS/GEM comm. interface

Adjustment to new standards

New PLC and
IPC control
systems

Safety upgrades

Dryer upgrades

Upgrade degree
of tool
automation

AP&S refurbishment is available for the following wet process tool types:

✓ AP&S

 ✓ HMR

 ✓ Steag (successor: Mattson / Akrion)

✓ Lotus Systems

 ✓ FSI Mercury 

FSI MERCURY REFURBISHMENT

WE MAKE YOUR FSI MERCURY TOOL FIT FOR THE FUTURE

AP&S refurbishes all kinds of Mercury tools and adapt them to the steadily increasing technology requirements. Our FSI Mercury refurbishment program offers the following options:

  • Replacement of critical parts like controls, pneumatic modules, displays, measuring devices and switching racks
  • Guaranteed availability of spare parts for 10 years, achieved by using state-of-the-art components
  • 18“ touch display for ergonomic operation
  • Latest software including SECS interface
  • Innovative software options like dashboards for service and maintenance, parameter monitoring etc.

Spare Parts

SPARE PARTS

MAXIMUM UPTIME THROUGH FAST DELIVERY

Guaranteed availability of spare parts ensures maximum uptime and therefore the efficiency of your wet process tools. Therefore AP&S offers you a wide range of spare parts and fast delivery to customers worldwide. Supply from our warehouse or from consignment stock on-site are both possible.

Contact

Spare parts

Natalie Streidenberger

Spare Parts & Service Supply

+ 49 771 8983-177

IoT

SMART MANUFACTURING

CONVENIENT CONTROL AND DATA ACCESS

Our goal is not only to meet customers expectations, but to surpass these by exploring new paths. Therefore, we steadily develop new products and concepts, which optimize your wet processes with regard to cost reduction, maximizing of the production efficiency and quality improvement. Latest software solutions according to IoT are essential parts of our wet process tools, which offer you convenient control and fast data access wherever you are. 

AP&S WEB WORKER APP

Die AP&S Web Worker App ist ein großartiges Service-Tool, das Ihre Nassprozesse noch effizienter macht. Alle AP&S Nassprozessanlagen und entsprechende Ersatzteile sind mit QR-Codes gekennzeichnet. Der Scan dieser Codes führt zu einem ausführlichen Produktinformationsarchiv mit Datenblättern, Benutzerhandbüchern, elektrischen Diagrammen und Flussdiagrammen. Diese Daten werden sicher in einem AP&S IoT-Portal verwahrt. Die Informationen sind für autorisierte Mitarbeiter mit jedem mobilen Gerät jederzeit und von überall auf der Welt zugänglich. Dieser bequeme und zeitsparende Datenzugriff macht jeden Serviceeinsatz für unsere Außendiensttechniker sowie das Bedienen und Lösen von gerätespezifischen Fragen für die Maschinenbediener einfach und effizient.

Ein weiteres wichtiges Feature dieser App ist das integrierte Online-Buchungsformular, mit dem Sie jedes benötigte Ersatzteil mit nur einem Klick bestellen können.

After Sales

Contact

Tobias Drixler

For general inquiries concerning our After Sales portfolio please contact

Tobias Drixler, Vice President After-Sales & Service

+ 49 771 8983-148
+ 49 771 8983-100

Contact Form

General Service request

Please fill-in this contact form and enter your wet process tool type as well as the WB number in the field "Your message".

Our After Sales team will answer you within 24 hours.