Welcome to the AP&S Demo Center

Are you looking for a perfect wet process solution meeting your specific requirements? Come to our in-house application laboratory at the AP&S headquarters in Donaueschingen, Germany and you will find it.

An investment in a wet process application is a significant decision, at which many important aspects and complex contexts have to be taken into account. AP&S supports efficiently your decision making process by providing a variety of tool demonstrations. By visiting our demo center you will receive all required information for a well-founded buying decision:

Process experience 

In the AP&S demo center you can test the wet process application, which you are interested in. Our high-qualified process engineering team will explain you all details of the process tool and will answer all your questions. You will receive a comprehensive test report containing complete parameters of the process set-up, a recommendation for process recipe due to test results and further important system configuration details.

Quality check

After the demonstration the quality of the wet process results can be inspected with a microscope and a CCD-Camera.

Time and cost savings 

Until the start of the production we offer you an in-house process evaluation including a definition of process parameters, a calculation of the throughput as well as the chemical consumption.

High process efficiency and optimal outcome 

Prior to the tool delivery we invite your staff to our demo center for in-house trainings. Thus, directly after the tool installation they will be able to start their work and achieve optimal results with the new tool.  

Confidence 

By visiting the AP&S demo center you will get to know our wet process tools and their performance. Furthermore you will see the company headquarters including the production hall; find out how we use to work and last but not least you will get to know the people behind AP&S.

We look forward to your visit! Please fill-in the contact form and our process engineering team will contact you for making an appointment.

 

 >>Demo center contact form 

Wet process tool AP&S

Contact

For any questions concerning our demo center, please contact Stefan Zürcher, the responsible Process Engineer:

Phone +49 771-8983-0

Fax +49 771-8983-100

E-mail

Process engineer at AP&S

Technical specifications of the AP&S demo center 

Which wet process demonstrations are available?

Single wafer

  • metal lift-off
  • metal etching
  • various cleaning processes
  • mask cleaning
  • photoresist strip  

 

 

Which wafer sizes and chuck variations can be handled?

Wafer sizes

  • Diameter (round substrates): up to 300 mm
  • Side length (square substrates): up to 9“
  • Thickness: up to 10 mm

 Chuck variations

  • Low contact chucks
  • Vacuum chucks

Main features of the wet process demonstration tool:   

  • MegPie megasonic system
  • Megasonic nozzle
  • High pressure (DI-water/solvent)
  • Puddle nozzle / spray mixing nozzle
  • Backside protection with DI-H2O or N2
  • 4 chemicals distribution systems
  • 2 tempering units for solvent / acid / base application
  • Drain separation
  • Programmable chuck height
  • Automatic handling incl. wafer mapping up to 200 mm

Additional features: 

  • Presoak station
  • Ultrasonic cleaning module
inject product configurator
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The CleanStep Carrier Box significantly reducing the time required for carrier/FOUP cleaning and drying, delivers maximized productivity and superior technology by combining multiple work steps in one single tool.

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The SpinMask combines cleaning and drying of masks or other substrates of different cleaning applications with chemicals, integrated mega sonic system or brushes, easy handling, fully integrated process control and process monitoring.

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The fully automated Chemical Management System is designed to handle acids, solvents and caustics used in the semiconductor, micro mechanic and solar industries.