After Sales Portfolio


Sustainable support for wet processes in semiconductor fabs is offered by the AP&S After Sales Unit.

AP&S after-sales portfolio includes a wide range of services to ensure maximum performance of your wet process equipment. These include service support, spare parts supply, modernization programs, software and hardware upgrades. Our smart network of service locations and partners guarantees geographical proximity and timely response worldwide.

The AP&S service technician team provides reliable maintenance and technical support, equipment installation, relocation, and on-site machine upgrades. Spare parts supply is available through our warehouse, as well as a consignment stock model. AP&S overhaul programs for aging wet process equipment can provide a cost-effective alternative to purchasing new machinery. We offer these for the following equipment types: AP&S, HMR, Steag (Mattson/ Akrion), Lotus Systems and FSI Mercury.

We also support you in upgrading your wet process system to Windows 10, which is highly recommended to make your operating system ready for current and future updates to ensure its security. In addition, AP&S offers some innovative IoT developments for easier and faster machine operation and maintenance. These include the Web Worker App and the use of augmented reality for service, but also the new "Offline Recipe Editor" for the AP&S SpinStep series, which allows module recipes to be viewed, edited and created anytime, anywhere. 

You can find more information here. Requests can be sent to  be sent.