Spare Parts
Maximum uptime thanks to fast delivery
The reliable availability of spare parts ensures maximum service life and efficiency of your wet process tools. That is why AP&S offers a large selection of high-quality original parts and fast delivery worldwide. This ensures a perfect fit, the highest quality requirements and smooth production.
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Our spare parts portfolio includes:
- Spare parts recommendations for one or more machine types
- Spare parts packages with frequently required spare parts for stocking at your site
- Consignment stock concepts for high flexibility and low administrative effort
- Supply options for AP&S and other machine types
REPAIR
Quick & Qualified
Before, during and after the commissioning of AP&S wet process equipment in your semiconductor production plant, our team of highly qualified field service technicians will provide fast and competent support to ensure process reliability, high availability and optimum throughput.
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Our repair service includes:
- Maintenance through repair or replacement of defective components
- Calibration and adjustment for optimum performance
- Emergency repairs for the fastest possible activation of the system
- Fault diagnosis and estimation of repair costs
- Quality assurance by checking for full functionality with warranty
- Documentation of the repairs carried out
- Advice on optimal use and care of the product
- Cost-efficient and environmentally friendly remote support
Maintenance contracts
Predictive planning
Service & maintenance contracts not only offer financial benefits, but also make a significant contribution to the reliability and efficiency of your systems, leading to better performance and satisfaction in the long term.
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Advantages of our service & maintenance contracts:
- Cost savings through planned preventive measures
- Increased operational safety for stable and reliable production results
- Longer service life by reducing wear and tear and protecting the machines
- Customized maintenance plans for your production requirements
- Short distances thanks to global support
- Transparent documentation for better traceability
- Prioritized support in the event of problems
- Compliance with legal and safety requirements
- Convenience and security through the support of specialists
Upgrades
Equipment & software upgrades
The ability to adapt flexibly to changing conditions is crucial for sustainable success. This includes responding to challenges such as increasing cost pressure or rapidly changing technical requirements.
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To ensure that your machine also guarantees high productivity and the required spare parts availability in the long term, we support you throughout its entire service life. Our engineers work closely with you to develop tailor-made solutions and adapt your equipment optimally to new or changed requirements.
Upgrades are planned and integrated in accordance with the latest GMP and CE guidelines. Our team of experts will support you from individual consultation and planning to technical implementation and successful integration into your processes.
REFURBISHMENT
Higher production efficiency
Refurbishment programs modernize used wet processing tools to adapt them to current and future technological requirements. This not only extends the service life of the equipment, but also optimizes its efficiency.
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At the heart of this process are the individual requirements of our customers and our many years of expertise in automation and process control.
AP&S refurbishment is available for the following wet process tool types: AP&S, HMR, Steag, Mattson, Akrion, FSI Mercury and Lotus.
Our reconditioning programs include:
- Overhaul of machines
- Replacement of obsolete components
- Modifications of process modules
- New system software
- Integration of SECS/GEM interfaces
- Adaptation to new standards
- New PLC and IPC control standards
- Safety/Dryer/System upgrades
- Tool automation
ACADEMY
AP&S Academy
Challenges such as rapid capacity expansion and a shortage of skilled workers affect the semiconductor industry. This is precisely where the AP&S Academy concept comes in, to provide customers with optimum support in mastering these and other tasks in semiconductor manufacturing. We offer individual training formats and training modules covering all aspects of wet process technology. The trainers of the AP&S Academy make your team fit for handling wet process equipment in your semiconductor production, thus ensuring high machine availability and productivity.
WebWorker
The digital
Service tool
All system information is securely stored in the AP&S IoT portal and is accessible to authorized users worldwide - on both desktop computers and mobile devices. This saves valuable time, simplifies troubleshooting and increases the efficiency during service operations directly on site.
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The AP&S WebWorker platform is an innovative digital service tool designed to support your wet process equipment. It is currently being developed step by step in close collaboration with our customers – with the goal of making service processes more transparent, efficient and user-friendly.
Every AP&S system and spare part is equipped with a QR code that provides instant access to a central
information archive – including data sheets, electrical diagrams and flow charts.
A key feature is the integrated spare parts ordering function: with just a few clicks, required parts can be requested directly, while live inventory monitoring ensures up-to-date transparency on available parts.
Your benefits at a glance:
- Direct access to all relevant information linked to the physical object (QR code)
- Access to 3D models of components
- Bill of materials, maintenance matrix, e-plans and flow charts always available on the go
- Real-time monitoring of all AP&S systems
- Streamlined spare parts ordering via spare parts lists
- Faster response times and optimized workflows
- Live inventory monitoring – up-to-date transparency on available parts at all times
CONTACT AFTER-SALES
Our Team After-Sales
We are there for you. Here you will find your contact person.
Swetlana Altergott
After-Sales - Spare Parts
+49 771 8983-181
E-mail
Sabrina Leuenberger
After-Sales - Service & Maintenance Contracts
+49 771 8983-263
E-mail
Angelika Rentschler
After-Sales - Order processing
+49 771 8983-256
E-mail
CONTACT SERVICE
Our Team Service
We are there for you. Here you will find your contact person.
Maximilian Haase
Service
+49 1761 8983-233
E-mail
Michael Schlegel
Service
+49 771 8983-228
E-mail
René Wirthgen
Head of Academy & Team Lead Service Dresden
+49 1761 8983-247
E-mail
