CleanSurF® - the new AP&S Cleaner ensures maximum cleanliness in accordance with the highest cleanliness requirements to safeguard the process chains in semiconductor manufacturing and ensure maximum productivity.
The CleanSurF® convinces with its Load capacity of up to 12 x 12 inch FOUPs per run with optimized recipe time. In combination with a compact footprint of approx. 3 m² and a very low consumption of water and nitrogen the CleanSurF® also offers Extremely attractive TCO values.
The CleanSurF® concept is suitable for both manual as well as automatic loading designed. Two newly developed components contribute decisively to the optimal Particle and AMC-(airborne molecular contamination)-Cleaning performance as well as to shorter process times at:
- An innovative nozzle concept enables flexible, 360-degree, separately controllable handling of the nozzles. More than 50 nozzles (DIW and N2 nozzles) are installed in the tool, which provide a optimal cleaning result.
- A new carousel design consisting of drive technology, robust rotating frames and flexible equipment holders has new locking devices with additional safety functions. During manual loading, the rotating frame is firmly anchored, allowing convenient and above all Fast loading.
Latest software technology including HMI guarantee maximum process reliability. Clear monitoring incl. schematic display of the process chamber, process values and active spray elements, as well as simple recipe management and diverse export functions ensure a comfortable and easy system handling.
The self-contained process chamber convinces with a very wide loading window. The clear design ensures maximum safety as well as easy assembly and maintenance. By loading clean room side and access to the service area gray room side, valuable cleanroom space can be saved. Optionally, through a second process chamber door, a Airlock function for clean room, gray room separation possible.
The CleanSurF® complements the AP&S Cleaner Serieswhich previously consisted of the CB II and CB III products. "During product development, the following considerations were decisive for us: We wanted to develop a cleaner according to the latest technical standard, which enables both manual and automatic loading and increases the capacity of our previous cleaners. Our goal - a plant with efficient throughput and attractive TCO We have achieved this with our new CleanSurF®," explains Tobias Bausch, CMO & CTO at AP&S.