Smart bridge tool for batch processes of up to 100 wafers per run



Fully Automated

The A-Series is a high throughput wet process system with comprehensive process control. It offers optimized bath and equipment area utilization through 100 wafer half-space processing.

Main Benefits

  • 100 wafer half-space processing for optimized bath and equipment area utilization
  • High throughput due to optimized process times and 100 wafer batch size
  • Comprehensive control and regulation of process and bath stability for lower production costs and higher process reliability


  • Different wet cleaning proceses
  • RCA
  • Pre-diffusion
  • Pre Metal
  • Different etching processes, including oxide, nitride, polycrystalline, metals and silicides


  • Substrates
  • Wafer material
    Si, SiC, GaN, GaAs, sapphire, glass
  • Wafer sizes
    up to 6″ or 8″

Technical Features

  • SMIF system suitable (150 mm, 200 mm)
  • Automatic loading by robot system or OHT possible
  • Designed for up to 100 wafer batches
  • Dry-In / Dry-Out processing
  • Complies with: FM 4910, SEMI S2 and S8, SECS, GEM, CE
  • Process control through the latest software technology:
    Sensor software interface, suitable for in-house tracking system, extensive process documentation (consumption, media, temperature, cleaning cycles, end of run, login), individual recipes


AP&S Products in Use

If you have any questions or would like to contact us, we look forward to meeting you.