Chemicals Management System
The chemicals management system for acids, solvents and etchants used in the semiconductor, MEMS, microstructuring and R&D industries.
Chemicals Management System
AP&S PRODUCTS
Safe handling of chemicals.
Distributing, mixing and disposing of chemicals - you can do this smartly, safely and conveniently with this chemical management system. Chemical feed and chemical supply for your wet processes are thus flawless.
Main Benefits
- Highest safety standard
- Upgradeable system
- Small plant footprint
- Compatibility with common commercial systems
Processes
The chemicals management system of AP&S is available for the following applications:
- Chemical Distribution System (CDS)
- Chemical Mixing System (CMS)
- Chemical Waste System (CWS)
Substrates
Suitable for all common applications in semiconductor production
Technical Features
- Upgrades and extensions possible at any time
- Networking with other common systems possible
