CleanStep CB III

Efficient cleaning device for all standard boxes, FOUPs, SMIFs and carriers from 4" to 12".

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CleanStep CB III

AP&S PRODUCTS

Cleaner for boxes, FOUPs, SMIFs and carriers

CB III - Powerful and flexible with minimal space requirements

The CB III offers reliable cleaning technology on a footprint of just 3.1 m² and is ideal for demanding cleanroom applications. With unlimited recipe management, separate N₂ and DIW nozzles and a sensor-controlled DI hot water tank (240 l) with immersion heaters, it ensures stable processes and consistent cleaning results in any production environment.

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Main Benefits

  • Low consumption values thanks to multi-box cleaning
  • Easy handling thanks to plug & play mounting system
  • Flexibility thanks to innovative nozzle concept
  • Innovative, particle-free pump system
  • Small footprints: CB III 3.1 m²
  • Through the wall installation reduces cleanroom requirements
  • High loading capacity per cycle
  • Several work steps combined in one system (cleaning, drying, ionizing)
  • Reliable and durable tank heating with immersion heaters
  • User-friendly thanks to modern HMI
  • Data evaluation for process monitoring
  • One operator can operate several systems
  • Attractive TCO values
  • Convenient maintenance thanks to easy access to the service areas

Processes

  • Cleaning
  • Drying
  • Ionize

Substrates

For all standard boxes, FOUPs, SMIFs and carriers from 4"
up to 12".

Technical Features

  • Up to 3 runs per hour
  • Drying with filtered hot air
  • Individually adjustable nozzles
  • Various air filters to choose from
  • Numerous material versions
  • Safety sensor for detecting vibration and imbalance
  • Sensor-controlled safety drip tray
  • Stainless steel carousel
  • Chamber ionizing unit
  • Complies with the semi-standards (S2 & S8)
  • Footprint: 3.1m² (1855 x 1685 x 2860 mm)
  • Unlimited recipes
  • Additional N₂ gun for manual cleaning
  • 12.1" touch screen
  • Sensor-controlled DI hot water tank 240l with immersion heaters
  • Separate N₂ and DIW nozzles
  • High loading capacity (per cycle)
    • up to 8 x 12" FOUPs
    • up to 8 x 8" SMIFs
    • up to 8 x 8" boxes and carriers
    • up to 24 x 8" carriers
    • up to 16 x 4"-6" boxes and carriers
    • up to 48 x 4"-6" carriers

Options

  • One swivel arm for 12" internal cleaning
  • Second process chamber door offers practical airlock function for gray room/clean room separation
  • H₂O₂ cleaning function

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If you have any questions or would like to contact us, we look forward to meeting you.

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