CleanStep CB II and CB III
Efficient cleaning systems for all common carrier types, boxes, SMIF pods and FOUPs
CleanStep CB II and CB III
AP&S PRODUCTS
Box and Carrier Cleaner
The AP&S box and carrier cleaners CleanStep CBII and CBIII convince by their easy handling during loading and unloading and achieve optimum cleaning results.
Main Benefits
- The CleanStep Carrier Box combines several work steps in one tool.
- Up to 3 runs per hour
- Installation between cleanroom and grayroom is possible, as the tool is accessible from two sides (back and front).
Processes
- Cleaning and drying
Substrates
All common boxes and carriers
Technical Features
- Sophisticated box holder system for easy and quick exchange of different box and carrier types
- Easy handling incl. loading and unloading
- Process control via latest software technology
- Suitable for in-house tracking system
- Optimized plant footprint: CB II 1560 x 1900 x 2510 mm; CB III 1865 x 1685 x 2860 mm
- Cleanstep II loading capacity: 8 carriers and 8 boxes
- Cleanstep III loading capacity: 8 SMIFs and 8 doors + 8 carriers; 8 FOUPs and 8 doors.