CleanStep Tube

Cleaning of quartz tubes, liners and boats of different sizes in semiconductor manufacturing

CleanStep Tube


Vertical and Horizontal Design

It all starts with the basics, and we have them well under control: With this tool, we ensure maximum cleanliness in your fab. If the accessories and equipment are clean, the same is true for your products. Our cleaning systems have been in use for over 20 years with renowned semiconductor manufacturers worldwide and convince by their quality.

Main Benefits

  • Available in vertical and horizontal design
  • Modular setup
  • Space saving footprint
  • Modern graphical user interface
  • Very easy to maintain plant design


Cleaning steps with chemistry and rinsing with DIW


Quartz tubes in different sizes, liners and boats

Technical Features

  • Fully automatic cleaning process
  • Suitable for both high and low profile cassettes
  • Containers for cleaning media under the cleaning basin, bulk material filling and circulation
  • Reliable and convenient process control including recipe editor


AP&S Products in Use

If you have any questions or would like to contact us, we look forward to meeting you.