CleanStep Tube
Cleaning of quartz tubes, liners and boats of different sizes in semiconductor manufacturing
CleanStep Tube
AP&S PRODUCTS
Vertical and Horizontal Design
It all starts with the basics, and we have them well under control: With this tool, we ensure maximum cleanliness in your fab. If the accessories and equipment are clean, the same is true for your products. Our cleaning systems have been in use for over 20 years with renowned semiconductor manufacturers worldwide and convince by their quality.
Main Benefits
- Available in vertical and horizontal design
- Modular setup
- Space saving footprint
- Modern graphical user interface
- Very easy to maintain plant design
Processes
Cleaning steps with chemistry and rinsing with DIW
Substrates
Quartz tubes in different sizes, liners and boats
Technical Features
- Fully automatic cleaning process
- Suitable for both high and low profile cassettes
- Containers for cleaning media under the cleaning basin, bulk material filling and circulation
- Reliable and convenient process control including recipe editor
