CleanSurF automated
The fully automated box cleaner for 8“ SMIFs or 12" FOUPs
AP&S PRODUCTS
Fully automated cleaner for SMIFs and FOUPs
CleanSurF automated – Scalable high-end SMIF & FOUP cleaning for automated factories
The CleanSurF automated is a leader in box cleaning—designed for maximum efficiency, seamless fab integration, and uncompromising cleanliness. Its scalable, robot-based architecture enables high throughput and flexible configurations, perfectly tailored to the needs of modern automated fabs. Despite its powerful performance, CleanSurF automated impresses with its remarkably small footprint and smooth integration into OHT-based transport systems. Camera-monitored robotics ensure absolute process reliability, while optional features such as N2purging, ionization or gripper cleaning provide additional safety and flexibility. CleanSurF automated—the future-proof solution for 8" SMIF and 12" FOUP cleaning at the highest standard.
Main Benefits
- Individual adjustments thanks to innovative nozzle concept
- Particle-free process reliability: innovative pump system designed to meet highest purity standards
- Through-the-wall installation reduces cleanroom requirements
- High loading capacity per cycle
- Multi-process steps combined in one system (cleaning, drying, ionizing)
- Reliable and durable tank heating with quartz glass heating rods
- User-friendly thanks to modern HMI
- Data evaluation for process monitoring
- Attractive total cost of ownership (TCO): optimized design and durable components
- Convenient maintenance thanks to easy access to service areas
- Up to 3 runs per hour
- Drying with filtered hot air
- Individually adjustable nozzles
- Choice of various air filters
- Numerous material versions (PP or according to FM 4910)
- Safety sensor for detecting vibration and imbalance
- Sensor-controlled safety drip tray
- Stainless steel carousel
- Chamber ionization unit
- Complies with semi-standards S2 & S8
Processes
- Cleaning
- Drying
- Ionizing
Substrates
For 8“ SMIFs or 12" FOUPs.
Technical Features
- Scalable throughput
– Up to 12 x 12″ FOUPs (per unit)
– Up to 12 x 8″ SMIFs (per unit)
to multiple CleanSurF units placed side by side with customizable EFEM - Small footprint: 6.9 m²
(L x W x H: 1980 x 3480 x 2500 mm) - Seamless integration into OHT-based transport systems
- Robotics complies to ISO Class 2
- More safety through camera monitored robotic cell
Options
- Host process control via SECS/GEM interface
- Additional DI water filter
- RFID/barcode scanner
- Additional detergent tank with dosing pump
- Additional buffer stations
- N2purging system
- EFEM ionization unit
- Gripper cleaning station
