CleanSurF

The purity guarantor for all common boxes, FOUPs, SMIFs and carriers from 4" to 12".

CleanSurF

AP&S PRODUCTS

Cleaner for boxes, FOUPs, SMIFs and carriers

CleanSurF - Compact high-end cleaning for boxes and carriers

The CleanSurF combines proven AP&S cleaning technology with advanced features for maximum process reliability. With a footprint of just 3.6 m², it offers unlimited recipe management, optional automation via a robot cell connection and a sensor-controlled DI hot water tank (360 l) with immersion heaters. Separate N₂ and DIW nozzles ensure precise and efficient cleaning - CleanSurF is the powerful solution for demanding cleanroom processes.

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Main Benefits

  • Low consumption values thanks to multi-box cleaning
  • Easy handling thanks to plug & play mounting system
  • Flexibility thanks to innovative nozzle concept
  • Innovative, particle-free pump system
  • Small footprint: CleanSurF 3.6 m²
  • Through the wall installation reduces cleanroom requirements
  • High loading capacity per cycle
  • Several work steps combined in one system (cleaning, drying, ionizing)
  • Reliable and durable tank heating with immersion heaters
  • User-friendly thanks to modern HMI
  • Data evaluation for process monitoring
  • One operator can operate several systems
  • Attractive TCO values
  • Convenient maintenance thanks to easy access to the service areas

Processes

  • Cleaning
  • Drying
  • Ionize

Substrates

For all standard boxes, FOUPs, SMIFs and carriers from 4"
up to 12".

Technical Features

  • Up to 3 runs per hour
  • Drying with filtered hot air
  • Individually adjustable nozzles
  • Various air filters to choose from
  • Numerous material versions (PP or according to FM 4910)
  • Safety sensor for detecting vibration and imbalance
  • Sensor-controlled safety drip tray
  • Stainless steel carousel
  • Chamber ionizing unit
  • Complies with the semi-standards (S2 & S8)
  • Small footprint: 3.6 m² (1980 x 1845 x 2766 mm)
  • Unlimited recipes
  • Complete automation thanks to possible connection to robot cell
  • Additional N₂ gun for manual cleaning
  • 15.6" touch screen
  • Sensor-controlled DI hot water tank 360l with immersion heaters
  • Separate N₂ and DIW nozzles
  • High loading capacity (per cycle)
    • up to 12 x 12" FOUPs
    • up to 12 x 8" SMIFs
    • up to 12 x 8" boxes and carriers
    • up to 18 x 6" boxes and carriers

Options

  • Two swivel arms for 12" internal cleaning
  • Second process chamber door offers practical airlock function for gray room/clean room separation
  • Booster tank 60l

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If you have any questions or would like to contact us, we look forward to meeting you.

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