The purity guarantor for all common carrier types, boxes, SMIF pods and FOUPs.
The latest AP&S cleaning tool.
CleanSurF allows both manual and automatic loading and convinces by its high loading capacity. This cleaning system offers efficient throughput and attractive TcO values.
- Optimum cleaning performance thanks to the newly developed nozzle concept with over 50 nozzles (DIW as well as N2 nozzles)
- Attractive TcO values - very low consumption of water and nitrogen and extremely compact footprint of 3 m²
- High loading capacity of up to 12 x 12 inch FOUPs per run
- Latest software technology including HMI according to Semi II standard
- Maximum flexibility - optimized for manual and automatic loading
- Practical airlock function - loading on the cleanroom side and access to the service area on the grayroom side possible. Optionally, a lock function for cleanroom/grayroom separation is possible through a second process chamber door.
- Cleaning and drying
All common carrier types, boxes, SMIF pods and FOUPS.
- Sophisticated box holder system for easy and quick exchange of different box and carrier types
- Easy handling incl. charging and discharging
- Process control via latest software technology
- Suitable for in-house tracking system
- Optimized plant footprint: CB II 1560 x 1900 x 2510 mm; CB III 1865 x 1685 x 2860 mm