CleanSurF
The purity guarantor for all common boxes, FOUPs, SMIFs and carriers from 4" to 12".
AP&S PRODUCTS
Cleaner for boxes, FOUPs, SMIFs and carriers
CleanSurF - Compact high-end cleaning for boxes and carriers
The CleanSurF combines proven AP&S cleaning technology with advanced features for maximum process reliability. With a footprint of just 3.6 m², it offers unlimited recipe management, optional automation via a robot cell connection and a sensor-controlled DI hot water tank (360 l) with immersion heaters. Separate N₂ and DIW nozzles ensure precise and efficient cleaning - CleanSurF is the powerful solution for demanding cleanroom processes.
Main Benefits
- Low consumption values thanks to multi-box cleaning
- Easy handling thanks to plug & play mounting system
- Flexibility thanks to innovative nozzle concept
- Innovative, particle-free pump system
- Small footprint: CleanSurF 3.6 m²
- Through the wall installation reduces cleanroom requirements
- High loading capacity per cycle
- Several work steps combined in one system (cleaning, drying, ionizing)
- Reliable and durable tank heating with immersion heaters
- User-friendly thanks to modern HMI
- Data evaluation for process monitoring
- One operator can operate several systems
- Attractive TCO values
- Convenient maintenance thanks to easy access to the service areas
Processes
- Cleaning
- Drying
- Ionize
Substrates
For all standard boxes, FOUPs, SMIFs and carriers from 4"
up to 12".
Technical Features
- Up to 3 runs per hour
- Drying with filtered hot air
- Individually adjustable nozzles
- Various air filters to choose from
- Numerous material versions (PP or according to FM 4910)
- Safety sensor for detecting vibration and imbalance
- Sensor-controlled safety drip tray
- Stainless steel carousel
- Chamber ionizing unit
- Complies with the semi-standards (S2 & S8)
- Small footprint: 3.6 m² (1980 x 1845 x 2766 mm)
- Unlimited recipes
- Complete automation thanks to possible connection to robot cell
- Additional N₂ gun for manual cleaning
- 15.6" touch screen
- Sensor-controlled DI hot water tank 360l with immersion heaters
- Separate N₂ and DIW nozzles
- High loading capacity (per cycle)
- up to 12 x 12" FOUPs
- up to 12 x 8" SMIFs
- up to 12 x 8" boxes and carriers
- up to 18 x 6" boxes and carriers
Options
- Two swivel arms for 12" internal cleaning
- Second process chamber door offers practical airlock function for gray room/clean room separation
- Booster tank 60l
#CONTACT
AP&S Products in Use
If you have any questions or would like to contact us, we look forward to meeting you.
