CleanSurF

The purity guarantor for all standard boxes, FOUPs, SMIFs, and carriers from 4“ to 12“

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CleanSurF

AP&S PRODUCTS

Cleaner for boxes, FOUPs, SMIFs and carriers

CleanSurF – High-throughput high-end cleaning

The CleanSurF combines AP&S's proven cleaning technology with extended functions for maximum process reliability and the highest throughput of the product family. With a footprint of just 3.6 m², it offers unlimited recipe management, optional automation via a robot cell connection and a sensor-controlled DI hot water tank (360 l) with immersion heaters. Separate N₂ and DIW nozzles ensure precise and efficient cleaning – CleanSurF is the powerful solution for demanding cleanroom processes.

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Main Benefits

  • Low consumption values thanks to multi-box cleaning
  • Plug & Play Fixture System – tool-free change in seconds
    Quick replacement of box and carrier holders for maximum flexibility and minimal downtime
  • Individual adjustments thanks to innovative nozzle concept
  • Particle-free process reliability: innovative pump system designed to meet highest purity standards
  • Minimal footprint with maximum performance: 3.6 m²
  • Through-the-wall installation reduces cleanroom requirements
  • High loading capacity per cycle
  • Mixed loading possible for transport boxes
  • Multi-process steps combined in one system (cleaning, drying, ionizing)
  • Reliable and durable tank heating with quartz glass heating rods
  • User-friendly thanks to modern HMI
  • Data evaluation for process monitoring
  • One operator can operate several systems
  • Attractive total cost of ownership (TCO): optimized design and durable components
  • Convenient maintenance thanks to easy access to service areas
  • Up to 3 runs per hour
  • Drying with filtered hot air
  • Individually adjustable nozzles
  • Choice of various air filters
  • Numerous material versions (PP or according to FM 4910)
  • Safety sensor for detecting vibration and imbalance
  • Sensor-controlled safety drip tray
  • Stainless steel carousel
  • Chamber ionization unit
  • Complies with semi-standards S2 & S8

Processes

  • Cleaning
  • Drying
  • Ionizing

Substrates

For all standard boxes, FOUPs, SMIFs and carriers from 4"
up to 12".

Technical Features

  • High loading capacity (per cycle)
    – Up to 12 x 12” FOUPs
    – Up to 12 x 8” SMIFs
    – Up to 12 x 8” boxes and carriers
    – up to 24 x 8” only carriers
    – Up to 18 x 4”-6” boxes and carriers
    – Up to 48 x 4”-6” only carriers
  • Small footprint:
    3.6 m² (LxWxH: 1980 x 1845 x 2500 mm)
  • Unlimited recipes
  • Complete automation thanks to possible connection to robot cell
  • Additional N2-Gun for manual cleaning
  • 15.6" touch screen
  • Sensor-controlled DI hot water tank, 360 l, with immersion heaters
  • Separate N2– and DIW nozzles

< to product filters

Options

  • Host process control via SECS/GEM interface
  • Additional DI water filter
  • RFID/barcode scanner
  • Additional detergent tank with dosing pump
  • Two swivel arms for 12" internal cleaning
  • Second process chamber door offers practical airlock function for gray room/clean room separation
  • Booster tank 60 l

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If you have any questions or would like to contact us, we look forward to meeting you.

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