Mini Chemical Management System
The Mini Chemical Management System was developed specifically as a companion module for the AP&S single-wafer series.
The Mini Chemical Management System was specially developed as a companion module for the AP&S single-wafer series. It is particularly convincing due to its compact design and convenient and simple operation. Access for handling and filling is only required from the front side, so that the module can be placed on the wall of the clean room to save space.
The AP&S Chemical Management System is available for the following applications:
- Mini Chemical Management System (MCDS)
- Mini Chemical Mixing System (MCMS)
- Mini Chemical Waste System (MCWS)
- Mini Chemical Recirculation System (MCRS)
- Mini Chemical Supplement System (MCSS)
- Highest safety standard
- Upgradeable system
- Small footprint
- Linking with commercially available systems