Wouldn't it be great to have one cleaning system for all the different types of boxes, carriers, SMIF pod's and FOUP's used in the semiconductor factory? How much space this would save, how much time and effort. Just fantastic isn't it? Yes it is! And that's exactly what our cleaning all-rounder CleanStep CBIII offers you.

Without additional tools or adjustments, CBIII cleans all common types of boxes, carriers, SMIF pods and FOUPs. It can be easily connected to the in-house tracking system and seamlessly records the cleaning processes.

This hardworking and compact cleaning genius achieves up to 3 passes per hour. The process control works with the latest SECS/GEM software technology and guarantees a smooth process flow. The simple and fast loading ensures that your operators will also be thrilled with the CleanStep CBIII.

Efficiency, reliability and maximum flexibility - it's all in here. See for yourself in the product film.

You already have one of them in your factory. Congratulations, you have done everything right.
What? You don't have a CBIII in your semiconductor fab yet? Ok, don't worry, just hurry up and get one.

For more product details, please contact our sales team: