MultiStep
Semi-automatic wet bench with a compact footprint and a wide range of configuration options
MultiStep
AP&S PRODUCTS
Modular
A compact wet process plant that can be expanded at any time thanks to its modular design, thus offering AP&S customers a high degree of flexibility
Main Benefits
- Smart, modular design for convenient and cost-effective installation and maintenance as well as for high flexibility for upgrades
- Different wafer sizes and thicknesses can be processed, no adjustments/modifications to the system are required for this purpose.
- Highest reliability with a plant operating time of ≥ 97%
Processes
- Different wet cleaning proceses
- RCA
- Pre-diffusion
- Pre-metal
- Different etching processes, including oxide, nitride, polycrystalline, metals and silicides
Substrates
- Substrates
Wafers, MEMS, optoelectronics, photomasks, glass - Wafer material
Si, SiC, GaN, GaAs, Sapphire, Glass - Wafer sizes
up to 8″
Technical Features
- Optimized plant footprint
- The plant configuration can be adapted cost-effectively to future product / process changes and customer requirements
- Processes 2 x 25 wafer stacks with 4 to 6" or 25 x 8" substrates
- Complies with: FM 4910, SEMI S2 and S8, SECS, GEM, CE
- Process control through the latest software technology:
Sensor software interface, suitable for in-house tracking system, extensive process documentation (consumption, media, temperature, cleaning cycles, end of run, login), individual recipes
